{"id":10109,"date":"2021-10-20T12:54:56","date_gmt":"2021-10-20T03:54:56","guid":{"rendered":"https:\/\/futaku.co.jp\/?page_id=10109"},"modified":"2022-04-21T13:29:00","modified_gmt":"2022-04-21T04:29:00","slug":"leaktest-en","status":"publish","type":"page","link":"https:\/\/futaku.co.jp\/en\/machinery-en\/leaktest-en\/","title":{"rendered":"Leak Detection Testing Devices"},"content":{"rendered":"\n
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Leak detection test for high quality joints<\/h2>\n

Medical and analysis nozzles are required to have no liquid leakages as well as to have high airtightness under extra high vacuum, especially in semiconductor industry. FUTA-Q employs diversified leak detection testing methods that can meet a wide range of requirements.<\/p>\n<\/div>\n\n

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Types of leak detection tests<\/h2>\n

Among daily commodities, watches or remote-control keys of vehicles are conducted with leak detection test to check their waterproof performance. The test is expected to find the existing of a gap in combined areas or a crack of casings. For the components of semiconductor instruments or vacuum equipment, a more reliable leak detection testing is employed. For example, a helium leak testing is employed for finding a pin hole in a welded metal joint.\nVarious kinds of leak testing methods have been devised to meet quality requirements of products.\n<\/p>\n<\/div>\n\n\n\n

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Testing methods in FUTA-Q<\/h2>\n\n\n\n\n\n\n
Testing methods<\/th>\nFeatures<\/th>\nIn production<\/th>\n<\/tr>\n
Underwater bubbling method<\/td>\nA product connected with an air pipe is submerged. Air of 0.2 MPa is sent to the product through the pipe to observe if air bubbles leak from the product.<\/td>\nPrototyping and volume<\/td>\n<\/tr>\n
Helium leak detection method<\/td>\nTesting the components of semiconductor instruments or vacuum equipment uses this test method. The inside of a product is evacuated to an ultra-high vacuum to check if helium leaks into the product.<\/td>\nPrototyping and volume
(Please refer to the following)<\/td>\n<\/tr>\n
Differential pressure method<\/td>\nPressurized air is sent to both a product and the master sample, and the possible pressure difference between them is monitored after a predetermined time. A defective one should have a different differential pressure from that of a non-defective one.<\/td>\nVolume
(Please refer to the following)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n\n\n\n
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Helium leak detection method<\/h2>\n
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Testing a metal jointing area of a semiconductor instrument\u2019s component uses the helium leak detection method. This method can detect minute leaks of 1\u00d710-9 Pam3\/s and guarantee that the tested products have high reliability for the use under a high vacuum environment.<\/p>\n

\u3010Testing procedure\u3011<\/p>\n